MVSystems, Inc.

Reel to Reel Cassette Cluster Tool System
US patent number: 6,258,408 B1

Designed for flexible displays and solar panels.

• The central chamber (ITZ) houses a transport mechanism and transports a cassette with the flexible material from one chamber to another.
• Contamination eliminated-- leads to higher performance devices. The conventional in-line roll to roll systems cannot eliminate cross contamination.
• Process modules:
      o PECVD . Allows RF, VHF and pulsed plasma to increase deposition rate.
      o Sputtering (ITO, ZnO, metals), etc.
      o Independently controlled process modules. Allows simultaneous depositions in all chambers.
      o Expandable for larger throughput.
      o Modules can be reconfigured into an in-line unit.
      o R and D, prototype and production systems.
      o Computer controlled with optional data logging.
      o Web width: 15cms or 30 cms.
      o US patent number: 6,258,408 B1

View movie of Reel to Reel Cassette Transfer